Raman Spectroscopy As New Inline Metrology

Il y a 5 mois


Crolles, France Stmicroelectronics Temps plein

**Raman Spectroscopy as new inline metrology technique M/F**:

- Réf
- **ABG-111806**
- Sujet de Thèse- Junior- 07/03/2023- CDI- Stmicroelectronics- Lieu de travail- Crolles - Auvergne-Rhône-Alpes - France- Intitulé du sujet- Raman Spectroscopy as new inline metrology technique M/F- Champs scientifiques- Electronique

**Description du sujet**:

- Thèse CIFRE en partenariat avec le CEA-LETI
- This work will anticipate the potential adoption of Raman spectroscopy as a new metrology technique in a state-of-the-art fab environment through the evaluation of its benefit for advanced materials characterizations and/or process control:
- development of Raman Spectroscopy as a valuable complementary inline metrology technique.
- optimization of spectra analysis from multiple wavelengths (absorption depth) and incoming polarization to enhance signal level and quality.
- development of advanced fitting methodologies (modeling) to enable the extraction of quantitative values.

Raman optical technique can be applicable for composition and phase of new materials, strain of Si based materials, phases of silicides, Polysilicon crystallinity, etc.- Research will be backed by LETI and a join development program with a major semiconductor supplier:
- direct access to inline capability at LETI clean room
- LETI has developed strong expertise in Raman analysis and is equipped with manual loading Raman systems in clean room and offline.
- LETI will receive by 2023 Q2 an automated system from supplier.
- LETI has started Raman modeling activities based on ab initio approaches that could be transferred to ST.

**Nature du financement**:
**Précisions sur le financement**:
**Présentation établissement et labo d'accueil**:

- StmicroelectronicsSTMicroelectronics is a leading semiconductor company, a world key player thanks to our more than 50,000 employees including 8,300 working in R&D.

ST's products are found everywhere today. And together with our customers, we are enabling smarter driving, homes, factories, and cities, along with the next generation of mobile and Internet of Things devices.
Everywhere microelectronics makes a positive contribution to people lives, ST is there.

Engineer or master 2 degree.
Suitable competencies: optics, electronics, semiconductor, thin films materials, strain, light-matter interaction, modeling.